Abstract
Simulation plays an important role in researching, developing and testing Integrated Circuit (IC) manufacturing equipments. It is possible to test most of the functions and performance on simulation platform, and simulation platform can be used to verify the consistency of the process and the reliability of IC manufacturing equipment at the same time. In order to achieve a class of general and configurable simulation platform, which is based on SEMI standard. This paper describes component simulation platform framework and design methodology. Equipment maintenance time could be reduced and equipment utilization could be maximized with this simulation system. As a case study, the gas deliver subsystem test simulation is investigated on the designed component simulation platform, the simulation results show that the component simulation platform is helpful for rapid installation of IC equipment and verify its functions due to the automotic configuration of the component simulation middleware.